氟氧化钇是一种无机化合物,化学式为YOF。[1]在一般条件下,该化合物是无色固体。[2]
- 在真空中将氟化钇的水合晶体加热到900 °C,使其分解:
氟氧化钇会形成四方晶系的晶体。它的晶格参数是a = 0.3910 nm,c = 0.5431 nm。根据六方晶系,晶格参数是a = 0.38727 nm,c = 1.897 nm,Z = 6。
稳定氟氧化钇用于等离子体装备的内壁。[3][4]
- ^ Mann, A. W.; Bevan, D. J. M. The crystal structure of stoichiometric yttrium oxyfluoride, YOF. Acta Crystallographica. 1970, B26 (12): 2129–2131 [16 June 2017]. doi:10.1107/S0567740870005496. (原始内容存档于2023-05-05).
- ^ Рипан, Р.; Четяну, И. Неорганическая химия. 1992 (俄语).
- ^ Shiba, Yoshinobu. Stable yttrium oxyfluoride used in plasma process chamber. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. January 2017, 35 (2): 021405. Bibcode:2017JVSTA..35b1405S. doi:10.1116/1.4975143.
- ^ Tsunoura, Toru; Yoshida, Katsumi; Yano2, Toyohiko; Kishi, Yukio. Fabrication, characterization, and fluorine-plasma exposure behavior of dense yttrium oxyfluoride ceramics. Japanese Journal of Applied Physics. 2 May 2017, 56 (6S2): 06HC02. Bibcode:2017JaJAP..56fHC02T. doi:10.7567/JJAP.56.06HC02.